Note: This content is accessible to all versions of every browser. However, this browser does not seem to support current Web standards, preventing the display of our site's design details.

  

A dual-stage nano-positioning approach to high-speed scanning probe microscopy

Author(s):

J. Lygeros, W. Haeberle, A. Pantazi, H. Rothuizen, A. Sebastian, T. Tuma
Conference/Journal:

IEEE Conference on Decision and Control, Maui, Hawaii, USA, pp. 5079-5084
Abstract:



Year:

2012
Type of Publication:

(01)Article
Supervisor:



File Download:

Request a copy of this publication.
(Uses JavaScript)
% Autogenerated BibTeX entry
@InProceedings { LygEtal:2012:IFA_4298,
    author={J. Lygeros and W. Haeberle and A. Pantazi and H. Rothuizen and A.
	  Sebastian and T. Tuma},
    title={{A dual-stage nano-positioning approach to high-speed
	  scanning probe microscopy}},
    booktitle={IEEE Conference on Decision and Control},
    pages={5079--5084},
    year={2012},
    address={Maui, Hawaii, USA},
    month=dec,
    url={http://control.ee.ethz.ch/index.cgi?page=publications;action=details;id=4298}
}
Permanent link