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Analysis and design of multiresolution scan trajectories for high-speed scanning probe microscopy


T. Tuma, J. Lygeros, A. Sebastian, A. Pantazi

IFAC Symposium on Mechatronic Systems, Hangzhou, China, pp. 138-144

Recently, a new family of multi-resolution scan trajectories for high-speed scanning probe microscopy has been introduced based on Lissajous patterns. In this mode of imaging, the cantilever tip traverses the sample by following a pattern which is created by two single-tone harmonic waveforms interfering in a two dimensional plane. This paper provides a rigorous analysis of some of the fundamental properties of Lissajous scan trajectories, such as the imaging time and spatial resolution, and presents a step-by-step procedure which allows for the design of such trajectories. We also explore the multiresolution character of Lissajous scan trajectories which enables for a real-time preview of the sample in fractions of the overall imaging time. Experimental results are presented to substantiate the analytical results.


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% Autogenerated BibTeX entry
@InProceedings { TumEtal:2013:IFA_4640,
    author={T. Tuma and J. Lygeros and A. Sebastian and A. Pantazi},
    title={{Analysis and design of multiresolution scan trajectories
	  for high-speed scanning probe microscopy}},
    booktitle={IFAC Symposium on Mechatronic Systems},
    address={Hangzhou, China},
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