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A high-speed electromagnetically-actuated scanner for dual-stage nanopositioning


J. Lygeros, W. Haeberle, A. Pantazi, A. Sebastian, T. Tuma

IFAC Symposium on Mechatronic Systems, Hangzhou, China, pp. 125-130

This paper presents the mechanical design, finite element simulations and experimental verification of an electromagnetically-actuated uniaxial high-speed nanopositioner. The nanopositioner is designed specifically as a fast, short-range scanner for a dual-stage nanopositioning system. To that end, the scanner has high linearity owing to its electromagnetic actuation and well-defined dynamic behavior over a large bandwidth. There was significant emphasis on reducing the mechanical and thermal coupling from the actuation block. Using model-based feedback controllers with direct shaping of the closed-loop noise transfer function, experimental results are presented in which the scanner is integrated in a dual-stage nanopositioning system and used for high-speed imaging in a custom-built atomic force microscope.


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% Autogenerated BibTeX entry
@InProceedings { LygEtal:2013:IFA_4642,
    author={J. Lygeros and W. Haeberle and A. Pantazi and A. Sebastian and T. Tuma},
    title={{A high-speed electromagnetically-actuated scanner for
	  dual-stage nanopositioning}},
    booktitle={IFAC Symposium on Mechatronic Systems},
    address={Hangzhou, China},
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