Note: This content is accessible to all versions of every browser. However, this browser does not seem to support current Web standards, preventing the display of our site's design details.

  

Dual-stage nanopositioning for high-speed scanning probe microscopy

Author(s):

J. Lygeros, W. Haeberle, A. Pantazi, H. Rothuizen, A. Sebastian, T. Tuma
Conference/Journal:

IEEE/ASME Transactions on Mechatronics, vol. 19, pp. 1035-1045
Abstract:

A novel positioning concept for high-speed scanning probe microscopy is presented in which a dual-stage nanopositioner is used for precise positioning over large areas at high speeds. The nanopositioner combines a low-bandwidth, large-range commercial scanner with a custom-designed highspeed scanner for short-range positioning. We present the mechanical design, finite element simulations and experimental characterization of the high-speed scanner, showing exceptionally clean dynamics, high linearity and large actuation bandwidth. The scanner is equipped with a magneto-resistive position sensing scheme that provides subnanometer resolution over a large bandwidth. Advanced model-based feedback controllers are designed according to a newly developed control design architecture with direct shaping of the closed-loop noise sensitivity and experimental results are presented in which the dual-stage system is used for high-speed imaging in a custombuilt atomic force microscope.

Year:

2014
Type of Publication:

(01)Article
Supervisor:



File Download:

Request a copy of this publication.
(Uses JavaScript)
% Autogenerated BibTeX entry
@Article { LygEtal:2014:IFA_5093,
    author={J. Lygeros and W. Haeberle and A. Pantazi and H. Rothuizen and A.
	  Sebastian and T. Tuma},
    title={{Dual-stage nanopositioning for high-speed scanning probe
	  microscopy}},
    journal={IEEE/ASME Transactions on Mechatronics},
    year={2014},
    volume={19},
    number={},
    pages={1035--1045},
    month=jun,
    url={http://control.ee.ethz.ch/index.cgi?page=publications;action=details;id=5093}
}
Permanent link